Thin film depth profiling by ion beam analysis
نویسندگان
چکیده
منابع مشابه
Elemental thin film depth profiles by ion beam analysis using simulated annealing—a new tool
Rutherford backscattering spectrometry (RBS) and related techniques have long been used to determine the elemental depth profiles in films a few nanometres to a few microns thick. However, although obtaining spectra is very easy, solving the inverse problem of extracting the depth profiles from the spectra is not possible analytically except for special cases. It is because these special cases ...
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ژورنال
عنوان ژورنال: The Analyst
سال: 2016
ISSN: 0003-2654,1364-5528
DOI: 10.1039/c6an01167e